Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems
نویسندگان
چکیده
منابع مشابه
Modeling an Electrostatically Actuated MEMS Diaphragm Pump
The recent advent of microelectromechanical systems (MEMS) or micro-devices has generated excitement in many diverse fields. In the area of micro-fluidics liquid pumps are highly desirable for fluid transport and atomization. A recent and popular example of this is the inkjet, which self-aspirates ink from a reservoir and then transports it to a chamber for expulsion as a single droplet during ...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2020
ISSN: 0960-1317,1361-6439
DOI: 10.1088/1361-6439/aba16f